Zr702 99.2% rolling annealed zirconium target
Zr702 Zr+Hf>99.2% rolling annealed bright zirconium target
1. Product name: High purity Zirconium Targets
2. Purity: Zr+Hf>99.95%, Hf<300ppm.
3. Confirmation: ISO9001:2008 certified
4. Standard:GB/T OR ASTM B550
5.Trace Elements
|
Grade |
Main Elements(ppm,max) |
||||||||
|
Hf |
Nb |
Mo |
Cr |
Al |
Ti |
Mn |
Ni |
||
|
Zr+Hf>99.95%
|
200 |
5 |
10 |
10 |
100 |
10 |
5 |
50 |
|
|
|
Cu |
Sn |
Sb |
W |
Pb |
Bi |
Mg |
P |
|
|
|
5 |
50 |
5 |
10 |
5 |
5 |
5 |
10 |
|
|
|
Si |
N |
C |
H |
O |
S |
Fe |
|
|
|
|
100 |
30 |
30 |
10 |
150 |
20 |
100 |
|
|
6.Following standards to be applied if no specific tolerance for billets is provided.
|
Dimension |
Square |
Tolerance |
Measuring tools |
Remarks |
|
L(mm) |
L |
>-3 |
calliper or tape |
L,W,T represents length, width and thickness of the square. |
|
W(mm) |
W |
>-3 |
calliper or tape |
|
|
T(mm) |
T |
>-1 |
calliper |
7.Following standards are to be applied when no specific requirements on flatness, parallelism and perpendicularity for 产品展示 are provided.
(1) Flatness Standard;
|
Shape |
Round |
Square |
Round |
Square |
Square |
Remarks |
|
Dimension(mm) |
D≤300 |
L≤500 |
D>300 |
500 |
X>1000 |
|
|
Tolerance(mm) |
0.1 |
0.3 |
0.5 |
Thickness>8mm
|
||
|
Tolerance(mm) |
0.25 |
0.35 |
0.5 |
Thickness≤8mm
|
||
(2)Parallelism and Perpendicularity
|
Dimension(mm) |
D≤300 |
L≤400 |
D>300 |
400 |
X>800 |
|
Parallelism(mm) |
0.1 |
0.25 |
0.3 |
||
|
Perpendicularity(mm) |
0.15 |
0.25 |
0.3 |
||
(3)Roughness
|
Part |
Back |
Sputtering surface |
The side and other surfaces |
|
Ra(μm) |
0.8-1.6 |
0.8-1.6 |
3.2 |
Chemical composition of Zr702 (R60702)
|
Zr702 |
Zr+Hf |
Hf |
Fe+Cr |
H |
C |
O |
|
Component % |
(Min) |
(Max) |
||||
|
|
4.5 |
0.20 |
0.005 |
0.05 |
0.16 |
|
